微弧氧化沉积BaTiO3介电薄膜的截面结构研究
cross-section of BaTiO3 film synthesised by micro arc oxidation
王敏，郭会勇
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作者单位：广东技术师范学院
中文关键字：微弧氧化； BaTiO3；介电薄膜；截面结构
英文关键字：micro arc oxidation; BaTiO3; dielectric film; structure of cross-section
中文摘要：采用微弧氧化技术在工业纯Ti板表面沉积了BaTiO3薄膜，利用XRD、SEM、EPMA表征了薄膜表面及截面的物相组成、截面结构以及截面元素分布情况，并利用电容探测仪检测了薄膜的介电性能。结果表明：薄膜表面和截面均主要由四方相BaTiO3组成；薄膜截面可分为过渡层、致密层和疏松层，但各层元素含量不同；微孔的存在导致Ba、Ti、O三种元素在截面区域内的分布出现突变；测得薄膜在100Hz下的介电常数和介质损耗(tanδ)值分别为227.3和0.043。
英文摘要：BaTiO3 film was successfully fabricated by micro arc oxidation on titanium plate. X-ray Diffraction, Scanning Electron Microscopy and Electro-Probe Micro Analyzer were used to characterize the film’s crystalline structure and cross section. HP4284 capacitance prober was used to analyze the dielectric properties of the film. The results demonstrates that the micro arc oxidation film is mainly composed of tetragonal BaTiO3 phases; film section can be divided into transition layer , dense inner layer and loose layer; the distribution of Ba, Ti, and O were waved during the cross section area owing to the existence of micro pore; and the film possesses both high dielectric constant of 227.3 and low dielectric loss of 0.043 at the frequency of 100Hz.