TiB2靶材及涂层的制备
Preparation of TiB2 Target and Deposition of TiB2 Coating
欧阳辰鑫, 林文松, 吴柯夫
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作者单位：上海工程技术大学 材料工程学院, 上海 201620
中文关键字：燃烧合成； TiB2 涂层； 磁控溅射； 摩擦性能
英文关键字：combustion synthesis; TiB2 coating; magnetron sputtering; frictional behaviour
中文摘要：采用Ti粉和B粉燃烧合成制备了TiB2粉末，将所得粉末真空热压后得到TiB2磁控溅射靶材，并用射频溅射方法在不锈钢基片上沉积了TiB2涂层。采用XRD法检测了靶材和涂层的相结构组成；测试了涂层的显微硬度、干摩擦磨损性能。结果表明：靶材和涂层都由TiB2单相组成；与没有涂层的基片相比，TiB2涂层大幅度地提高了基片的硬度和耐磨性。
英文摘要：TiB2 target was fabricated by combustion synthesis and HPV(high-temperature pressing in vacuum) method. TiB2 coating was deposited on 304 stainless steel substrate by radio frequency magnetron sputtering. The crystal microstructure of the target and the coating were measured by X-ray diffraction. The microhardness, the friction and wear behaviors of the coating under dry friction condition were evaluated. The results show that the target and the coating consist of single phase TiB2. TiB2 coating enhances greatly wear resistance compared with the substrate under the same experimental conditions.