金属基类石墨复合膜微观组织结构分析
Analysis on Microstructure of Graphite-like Composite Coating on Metal Substrate
王佐平1, 邢建东1, 胡奈赛1, 王 伟2
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作者单位：1. 西安交通大学 金属材料强度国家重点实验室, 陕西 西安 710049; 2. 中国船舶重工集团公司 第十二研究所, 陕西 兴平 713102
中文关键字：类石墨复合膜； 渗碳淬火； 非平衡闭合磁控溅射
英文关键字：graphite like composite coating; carburizing and quenching; closed field unbalanced magnetron sputter iron
中文摘要：应用非平衡闭合磁控溅射技术在渗碳淬火基体上制备了类石墨复合膜，用SEM、AFM和TEM分析了金属基类石墨复合膜的表面形貌和截面结构，并测试了类石墨复合膜的摩擦学特性。结果表明，类石墨复合膜是由柱状多晶过渡层 + 非晶梯度层 + 类石墨复合层组成的多层结构。
英文摘要：The graphite-like composite coating was deposited by closed field unbalanced magnetron sputter iron plating technique. The surface and fracture morphology of the coating were observed by SEM and AFM, the cross-sectional structure was analyzed using TEM. The tribological properties curve of the coating was also tested. The results indicate that the graphite-like composite coating is made up of colummnar polycrystalline chromic metallic transition layer, amorphous gradient layer and graphite-like composite coating.