Abstract: Electron beam free form fabrication（EBF3） is widely used in the forming of large or medium-size titanium alloy products due to its low loss and high efficiency. Based on the improved Gauss rotating body heat source model, the simulation of EBF3process was realized by using the ABAQUS software platform, the life and death unit and the DFLUX subroutine. A flat plate’s shrinkage deformation was analyzed under two scanning paths including parallel Zigzag and cross Zigzag. The results show that the top surface of the flat plate has larger shrinkage deformation than that of the sides, and the maximum deformation can exceed 5%, while the cross Zigzag path scanning can reduce the warping deformation of the top surface. Compared with the cross Zigzag path scanning, the parallel Zigzag path scanning can reduce the uneven shrinkage of the four sides of the flat plate, and the maximum shrinkage deformation rate is close to 0.9%. The above results are valuable for actual production reference.