高熵合金涂层的磁控溅射制备及性能研究进展

    Research Progress in Preparation and Properties of Magnetron Sputtering of High Entropy Alloy Coating

    • 摘要: 高熵合金涂层以其优异的性能近年来得到深入研究,其中磁控溅射制备技术因其独有的优势而被广泛应用。论述了磁控溅射法制备高熵合金的工艺调控,分析了高熵合金涂层的力学、耐腐蚀及抗氧化等性能特点,并对其应用前景进行展望,促进磁控溅射法制备高熵合金涂层的研究及应用。

       

      Abstract: High-entropy alloy coatings have been in-depth research in recent years due to their excellent properties.Among them, magnetron sputtering preparation technology is widely used because of its unique advantages. The process control of magnetron sputtering for preparing high-entropy alloys was discussed. The mechanical, corrosion and oxidation resistance characteristics of high-entropy alloy coatings were analyzed, and its application prospects were looked forward. The research and application of high-entropy alloy coatings prepared by magnetron sputtering were promoted.

       

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