粉末预处理工艺对铝钛靶材氧含量和铝基体晶粒尺寸的影响

    Effects of Powder Pretreatment Process on Oxygen Content and Grain Size of Al-Ti Target

    • 摘要: 采用球磨-离心分离-混合预处理工艺制备了低氧含量的铝钛混合粉末,采用热等静压工艺使其致密化制备了铝钛靶材。采用氧氮分析仪和扫描电镜对铝钛靶材的氧含量和铝基体晶粒尺寸进行表征。结果表明:在球磨-离心分离-混合粉末预处理工艺中,随球磨原料粉末转速的增加,铝钛靶材中的氧含量逐渐降低,铝基体晶粒尺寸逐渐减小。这是由于经粉末预处理后,原料粉末表面脆性的氧化物薄膜逐渐破碎脱落并被分离出去。同时在原料粉末球磨过程中铝颗粒积累的应变能促进了热等静压时铝基体相的再结晶。当球磨转速为300 r/min时,铝钛合金靶材的氧含量降低到0.12%,铝基体的平均晶粒尺寸降低到2μm。

       

      Abstract: Al-Ti mixed powder with low oxygen content was prepared by pretreatment process,including ball-milling process, centrifugal separation process and mixture process, and Al-Ti target was prepared by hot isostatic pressing process.The oxygen content and grain size of Al-Ti target were characterized by oxygen-nitrogen analyzer and scanning electron microscope. The results show that, along with the increase of the rotating speed of the ball-milling raw material powder in the pretreatment process of ball-milling, centrifugal separation and powder mixed, both the oxygen content in the Al-Ti target and the grain size of the aluminum matrix decrease gradually. This is due to the fact that after powder pretreatment, the brittle oxidized film on the surface of the raw material powder is gradually fractured, peeled off and eventually separated out, and the strain accumulated in aluminum particles during the milling of the raw material powder promotes the recrystallization of the aluminum matrix phase during the hot isostatic pressing. When the milling speed is 300 r/min, the oxygen content of Al-Ti target is reduced to 0.12%, and the average grain size of aluminum matrix reduces to 2 μm.

       

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