微弧氧化和磁控溅射复合膜研究进展

    Research Progress of Composite Coatings Prepared by Micro-arc Oxidation and Magnetron Sputtering

    • 摘要: 微弧氧化和磁控溅射均作为较新的表面防护技术,具有一定的优越性,但也不可避免地存有缺点。因此,两技术的复合受到了研究者的关注。介绍了微弧氧化和磁控溅射制备膜层时各自成膜机理以及膜层的特点,着重归纳并总结了两技术结合时制备的复合膜的研究进展,并对其发展趋势进行了展望。

       

      Abstract: Micro-arc oxidation and magnetron sputtering, as relatively novel surface modification technologies, possess lots of advantages, but they also inevitably have shortcomings.Therefore, the combination of the two technologies has attracted the attention of researchers.The formation mechanisms of the coatings prepared separately by micro-arc oxidation and magnetron sputtering, as well as the characteristics of the corresponding coatings were introduced briefly.The research progress of the composite coatings formed via the combination of micro-arc oxidation and the magnetron sputtering was emphatically summarized, and its development trend was prospected.

       

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