Abstract: In order to improve the surface quality of die steel, TiCrAlN thin films were deposited on H13 die steel and nitrided H13 steel substrate by multi-arc ion plating technology.The effects of nitriding treatment of H13 steel substrate on the surface morphology, hardness, adhesion, oxidation resistance and friction and wear properties of the TiCrAlN were investigated. The results show that the surface of TiCrAlN coating prepared on H13 steel after nitriding treatment presents a more compact surface morphology, the particles are closely aligned with the particles, the surface is relatively flat, and the number of large particles is relatively small. The coating surface prepared before and after surface nitriding presents a preferred orientation of TiAlCrN (111) surface. Compared with the TiCrAlN coating without nitriding on the substrate, TiCrAlN coating prepared after surface nitriding has higher hardness and adhesion, respectively 2963.3 HV and 32.3 N, and has better high-temperature oxidation resistance. Compared with the TiCrAlN coating without nitriding of the substrate, the TiCrAlN coating prepared after surface nitriding has lower friction coefficient, less wear, and better friction and wear properties.After surface nitriding, the hardness of the nitrided substrate gradually decreases from outside to inside, forming a hardness gradient distribution, which helps to reduce stress concentration, enhances the resistance to deformation of the substrate, and improves the bonding performance between the coating and the substrate. It can stably support the coating to resist the wear load and improve the wear resistance of the coating.