Abstract: A microsupercapacitor with graphene sheets embedded carbon (GSEC) film electrode based on electron cyclotron resonance low energy electron irradiation technology was proposed and its electrochemical performance was studied.The results show that in the GSEC film, graphene nanocrystallites are embedded in amorphous carbon lattice.The density of the GSEC film is 1.67 g/cm³, indicating its atom arrangement is loose.The carbon atoms in the GSEC film are sputtered from carbon target and then deposited on current collector, so the film show the excellent adhesion force.A GSEC film based microsupercapacitor is assembled by face to face and the device presents good electrochemical performance.The relaxation time of the microsupercapacitor device is 3.6 ms.When the applied current density is 0.5 mA/cm², the volumetric capacitance, volumetric energy density and volumetric power density of the single electrode are 3.21 F/cm³, 0.07 mW·h/cm³ and 2.03 W/cm³, respectively.