PECVD法制备锆合金包壳管表面SiC涂层及性能研究

    Research on Properties of SiC Coating on Zirconium Alloy Clad Tube Surface Prepared by PECVD Method

    • 摘要: SiC是一种极具潜力的耐事故燃料包壳涂层材料。为避免锆合金包壳管强度的高温失效,需要开发SiC涂层的低温制备技术。采用等离子体增强化学气相沉积(PECVD)法,以甲基硅烷作为唯一反应气源,沉积温度低于锆合金最终退火温度(~600℃),在锆合金包壳管表面制出均匀致密的SiC涂层。利用X射线衍射仪、拉曼光谱仪、扫描电子显微镜、附着力划痕仪、万能试验机对锆合金包壳管SiC涂层的物相组成、微观形貌、结合强度和力学性能进行分析测试。结果表明:与常规化学气相沉积(CVD)制备技术相比,采用PECVD方法制备的SiC涂层为微晶态结构,涂层均匀、致密且光滑、平整,与锆合金包壳管基底结合良好。相比于CVD-SiC涂层样品,其轴向抗拉强度提高了约110 MPa,具有明显的性能优势。

       

      Abstract: SiC is a potential coating material for accident resistant fuel cladding. In order to avoid high-temperature failure of the strength of zirconium alloy clad tube, it is necessary to develop low-temperature preparation technology for SiC coating. Plasma enhanced chemical vapor deposition(PECVD) method was used to prepare uniform and dense SiC coating on the surface of zirconium alloy clad tube, using methylsilane as the only reaction gas source, and the deposition temperature was lower than the final annealing temperature of zirconium alloy(-600 ℃). The phase composition, micromorphology,bonding strength and mechanical properties of the SiC coating on zirconium alloy clad tube were analyzed and tested using X-ray diffractometer, Raman spectrometer, scanning electron microscope, atomic force microscope, adhesion scratch tester and universal testing machine. The results show that compared with conventional chemical vapor deposition(CVD)preparation technique, the SiC coating prepared by PECVD method has a microcrystalline structure, and the coating is uniform, dense, smooth and flat,which has excellent bonding with the zirconium alloy clad tube substrate. Compared to the CVD-SiC coating, the axial tensile strength has been improved by about 110 MPa, with significant performance advantages.

       

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