纳米银浆烧结特性及其互连接头性能研究

    Research on Sintering Characteristics of Silver Nanopaste and Its Interconnection Joint Performance

    • 摘要: 以GaN和Si C为代表的第三代材料在功率器件领域的应用上备受关注,因此对高温环境下互连材料的性能有了更高要求。通过对高导热的纳米银浆进行烧结从而对铜基板和框架进行组装,制备出纳米银烧结互连芯片基板试样,获得具有高强度的互连接头。通过多种设备对此种连接材料的导电性和导热性等关键性能进行了测试,同时研究了不同烧结温度、烧结时间等因素对烧结银接头剪切强度的影响。结果表明:确定的烧结最佳温度为250~300℃;该材料能满足高功率电子器件高温服役所需。

       

      Abstract: In recent years, the third-generation materials represented by GaN and Si C have attracted much attention in the field of power devices, so the performance of interconnection materials in high-temperature environments has higher requirements. The copper substrate and frame were assembled by sintering the nano-silver paste with high thermal conductivity, and the nano-silver sintered interconnect chip substrate sample was prepared, and then the interconnection joint with high strength was obtained; and the key properties such as electrical and thermal conductivity of this conection material were tested by a variety of equipment, and the influence of different sintering temperature, sintering time and other factors on the shear strength of the sintered silver joint was studied. The results show that the optimal sintering temperature is determined to be between 250-300 ℃; the material can meet the needs of high-power electronic devices for high-temperature service.

       

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