悬浮液等离子喷涂纳米氧化铝涂层的组织和介电性能研究

    Microstructure and Dielectric Property of Nano-Al2O3 Coatings Prepared by Suspension Plasma Spraying

    • 摘要: 采用悬浮液等离子喷涂α相和γ相两种Al2O3粉体制备低介电常数纳米Al2O3涂层。并与传统的大气等离子喷涂纳米团聚Al2O3涂层进行比较,研究了喷涂方式对涂层相组成、微观组织、硬度、孔隙率、介电常数的影响。结果表明:涂层最终相组成受粉末相组成和喷涂方式影响较大,γ团聚粉末制备的涂层拥有更多的γ相,为48.8%;悬浮液α相粉末制备的涂层保留了最多的α相,达到98.5%;γ相粉末悬浮液制备的涂层中γ相含量为34.4%,说明悬浮液喷涂工艺可以明显降低粉末在等离子体中的熔融数量,抑制γ相的优先成核。悬浮液涂层微观组织中完全熔融区与半熔融区无明显分界线,断裂截面未出现明显的层状结构与裂纹,悬浮液涂层熔融区域硬度离散度更小。γ相粉末悬浮液制备的涂层相对介电常数最低,约为5.96 F/m。悬浮液喷涂时粉体受热更加均匀,可降低γ相的优先形核,并改善涂层的微观组织和硬度分布均匀性。涂层的微观组织是影响悬浮喷涂涂层介电常数的主要影响因素。

       

      Abstract: Nano-Al2O3 coatings with low dielectric constants were fabricated via suspension plasma spraying two powders of α-Al2O3 and γ-Al2O3, and they were compared with conventional atmospheric plasma spraying nano-agglomerated Al2O3 coatings. The effects of spraying method on the phase composition, microstructure, hardness, porosity and dielectric constant were studied. The results show that the final phase composition of the coatings is greatly affected by the powder phase composition and the spraying method. The coating prepared by γ agglomerated powders has more γ phases, which is 48.8%, the coating prepared by suspension plasma spraying α phase powders has the highest α phase content, which is 98.5%, and the coating prepared by suspension plasma spraying γ phase powders has a γ phase content of 34.4%. It shows that the suspension spraying process can significantly reduce the amount of powder in the plasma and inhibit the preferential nucleation of the γ phase. There is no obvious boundary between the fully molten area and the semi-molten area in the suspension coating microstructure, no obvious layered structure and crack in the fracture section, and the hardness dispersion of the molten area of the suspension plasma coating is smaller. The coating prepared by suspension plasma spraying γ phase powders has the lowest relative dielectric constant, which is about 5.96 F/m. The powders are heated more evenly during suspension plasma spraying, which can reduce the preferential nucleation of the γ phase and improve the microstructure and hardness distribution uniformity of the coating. The coating microstructure is the primary influencing factor on the dielectric constant of the suspension plasma coating.

       

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