Abstract:
Multifunctional metasurface materials and fabrication techniques are a current hot topic in the fields of optics and electromagnetism. The research progress of multifunctional metasurface materials, including traditional metal and dielectric materials, dynamically tunable materials(such as phase-change materials, liquid crystal materials, and two-dimensional materials), composite and multifunctional materials, as well as emerging materials (such as topological quantum materials, biodegradable materials, and two-dimensional heterojunction materials),were systematically reviewed. The latest achievements in high-precision micro-nano fabrication technologies (such as lithography, electron beam etching, and nanoimprinting) and emerging manufacturing methods (such as 3D printing, self-assembly, and laser interference lithography) were discussed. The challenges in current research, such as material performance bottlenecks and process consistency issues, and the future breakthrough directions were looked forward, including intelligent material design, green manufacturing technologies, and cross-scale integration strategies. The continuous innovation of multifunctional metasurface materials and fabrication techniques promote their widespread application in optical communication, sensing, biomedicine, and other fields, which can provide important support for the development of next-generation intelligent optical devices.