微晶玻璃飞秒激光加工研究进展

    Research Progress on Femtosecond Laser Processing of Microcrystalline Glass

    • 摘要: 微晶玻璃具有优异的力学、热学、电学和光学性能等,在航空航天、电子信息、生物医疗等领域展现出巨大的应用潜力。然而,微晶玻璃固有的高硬度和脆性给传统加工方法带来了严峻挑战,传统机械加工容易产生微裂纹,化学腐蚀法则难以实现精细微结构加工。近年来,飞秒激光加工技术以其超短脉冲宽度和超高峰值功率的独特优势,为微晶玻璃的精密加工提供了新的解决途径。首先梳理了飞秒激光与微晶玻璃的相互作用机制,包括非线性吸收引发的材料改性、热效应诱导的应力演化以及晶相分布调控等。其次,分析了飞秒激光烧蚀、激光诱导改性结合化学刻蚀、晶化/相变法及飞秒激光复合加工等方法,及其在微流控芯片、光学器件集成、表面功能化、纳米结构诱导生长和材料连接切割等领域的典型应用。最后,总结了微晶玻璃飞秒激光加工仍存在的问题与应对策略,指出后续研究可通过高功率激光系统研发、加工过程实时监测、三维结构制备技术创新及融合人工智能等方法,推动微晶玻璃飞秒激光加工的规模化应用。

       

      Abstract: Microcrystalline glass possesses outstanding mechanical, thermal, electrical and optical properties, etc., and shows great application potential in fields such as aerospace, electronic information and biomedicine. However, the inherent high hardness and brittleness of microcrystalline glass pose severe challenges to traditional processing methods. Traditional mechanical processing is prone to generating microcracks, and chemical corrosion methods are difficult to achieve fine microstructure processing. In recent years, femtosecond laser processing technology, with its unique advantages of ultra-short pulse width and ultra-high peak power, has provided a new solution for the precision processing of microcrystalline glass. In view of this, the interaction mechanisms between femtosecond laser and microcrystalline glass including material modification caused by nonlinear absorption, stress evolution induced by thermal effect, and regulation of crystal phase distribution, etc.were firstly sorted out. Secondly, methods such as femtosecond laser ablation, laser-induced modification combined with chemical etching, crystallization/phase change, and femtosecond laser composite processing were analyzed, as well as their typical applications in fields of microfluidic chips, optical device integration, surface functionalization, nanostructure-induced growth, and material connection and cutting. Finally, the existing problems and solutions in the femtosecond laser processing of microcrystalline glass were summarized. Subsequent research can promote the large-scale application of femtosecond laser processing of microcrystalline glass through methods such as the development of high-power laser systems, real-time monitoring of the processing process, technological innovation in three-dimensional structure preparation, and the integration of artificial intelligence.

       

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