Abstract:
Microcrystalline glass possesses outstanding mechanical, thermal, electrical and optical properties, etc., and shows great application potential in fields such as aerospace, electronic information and biomedicine. However, the inherent high hardness and brittleness of microcrystalline glass pose severe challenges to traditional processing methods. Traditional mechanical processing is prone to generating microcracks, and chemical corrosion methods are difficult to achieve fine microstructure processing. In recent years, femtosecond laser processing technology, with its unique advantages of ultra-short pulse width and ultra-high peak power, has provided a new solution for the precision processing of microcrystalline glass. In view of this, the interaction mechanisms between femtosecond laser and microcrystalline glass including material modification caused by nonlinear absorption, stress evolution induced by thermal effect, and regulation of crystal phase distribution, etc.were firstly sorted out. Secondly, methods such as femtosecond laser ablation, laser-induced modification combined with chemical etching, crystallization/phase change, and femtosecond laser composite processing were analyzed, as well as their typical applications in fields of microfluidic chips, optical device integration, surface functionalization, nanostructure-induced growth, and material connection and cutting. Finally, the existing problems and solutions in the femtosecond laser processing of microcrystalline glass were summarized. Subsequent research can promote the large-scale application of femtosecond laser processing of microcrystalline glass through methods such as the development of high-power laser systems, real-time monitoring of the processing process, technological innovation in three-dimensional structure preparation, and the integration of artificial intelligence.