Ag-Cu基复合钎料钎焊SiC/Cu工艺优化及接头力学性能研究

    Study on Brazing Process Optimization of SiC/Cu Using Ag-Cu Based Composite Solders and Mechanical Properties of Joints

    • 摘要: SiC陶瓷与金属的连接时存在热膨胀系数差异大、残余应力高等问题,影响封装结构的可靠性。首先,采用(Ag72Cu28)88Ti6Ni3Mo3复合钎料对SiC陶瓷与Cu进行钎焊连接,对焊后接头进行微观组织分析发现,在SiC侧的致密反应层厚度达到0.8 μm,实现了SiC陶瓷与钎料的良好反应。焊缝组织相主要有Ag固溶体、Cu固溶体、Cu-Ni-Ti相、Cu-Ti相、Ti-C相和强化相Mo颗粒,还有一些稳定的金属间化合物,如Cu的氧化相以及Ti的氧化相。随后,研究了钎料中不同Ti含量、钎焊工艺参数对接头剪切强度的影响。结果表明:采用(Ag72Cu28)88Ti6Ni3Mo3复合钎料,在930 ℃保温10 min得到的接头剪切强度最高,为79.7 MPa。接头在与焊缝相邻的SiC陶瓷侧形成裂纹源,并向SiC内部扩展,接头强度相对较高。

       

      Abstract: Joining SiC ceramics to metals presents challenges such as significant differences in thermal expansion coefficients and high residual stresses, which compromises the reliability of the packaging structure. Firstly, the (Ag72Cu28)88Ti6Ni3Mo3 composite filler metal was used to braze SiC and Cu. Microstructural analysis of the brazed joint revealed that the thickness of the dense reaction layer on the SiC side reached 0.8 μm, indicating a favorable reaction between the SiC ceramic and the filler metal. The microstructure of the brazed seam comprises Ag-based solid solution, Cu-based solid solution, Cu-Ni-Ti phase, Cu-Ti phase, Ti-C phase and strengthening Mo particles. Additionally, stable intermetallic compounds such as Cu oxides and Ti oxides are present. Then, the effects of different Ti content in the filler metal and brazing process parameters on the shear strength of the joint were investigated. The results show that the joint achieves the highest shear strength of 79.7 MPa when using the (Ag72Cu28)88Ti6Ni3Mo3 composite filler metal and undergoing a holding time of 10 minutes at 930 ℃. A crack initiates at the SiC ceramic near the weld and propagates into the interior of the SiC, while the joint maintains relatively high strength.

       

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