Abstract:
Joining SiC ceramics to metals presents challenges such as significant differences in thermal expansion coefficients and high residual stresses, which compromises the reliability of the packaging structure. Firstly, the (Ag
72Cu
28)88Ti6Ni3Mo3 composite filler metal was used to braze SiC and Cu. Microstructural analysis of the brazed joint revealed that the thickness of the dense reaction layer on the SiC side reached 0.8 μm, indicating a favorable reaction between the SiC ceramic and the filler metal. The microstructure of the brazed seam comprises Ag-based solid solution, Cu-based solid solution, Cu-Ni-Ti phase, Cu-Ti phase, Ti-C phase and strengthening Mo particles. Additionally, stable intermetallic compounds such as Cu oxides and Ti oxides are present. Then, the effects of different Ti content in the filler metal and brazing process parameters on the shear strength of the joint were investigated. The results show that the joint achieves the highest shear strength of 79.7 MPa when using the (Ag
72Cu
28)88Ti6Ni3Mo3 composite filler metal and undergoing a holding time of 10 minutes at 930 ℃. A crack initiates at the SiC ceramic near the weld and propagates into the interior of the SiC, while the joint maintains relatively high strength.